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215432

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Article

Last updated: 04 Jan 2025

Subjects

-

Tags

Electrical Engineering, Computer Engineering and Electrical power and machines engineering.

Abstract

This paper reports piezoelectric aluminum nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of microspeakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in ear applications. We introduce the principle, design, and characterization results. The speakers were fabricated on cavity silicon on insulator (SOI) substrate and characterized by using an electroacoustic tester. This paper considers the acoustic performance of the speakers. The results show that the speakers gave us a high sound pressure level (SPL) of more than 78 dB for circle geometry when applying 2 volts on the electrodes. These results are equal for PZT MEMS speakers moreover AlN opens the door to integrate the speakers and the ASIC on the same chip. The size of the different geometries' speakers isn't exceeded 3mm × 3mm. These geometries offer a breakthrough in acoustic performance, a frequency response, and low power consumption.

DOI

10.21608/jesaun.2021.105026.1087

Keywords

AlN, MEMS, Micro speakers, Piezoelectric

Authors

First Name

Ahmed

Last Name

Fawzy

MiddleName

-

Affiliation

1 Sokr Street, Ain Shams, Cairo, Egypt

Email

ahmed.fawzy.1986@ieee.org

City

cairo

Orcid

-

Volume

50

Article Issue

1

Related Issue

29242

Issue Date

2022-01-01

Receive Date

2021-11-08

Publish Date

2022-01-01

Page Start

1

Page End

8

Print ISSN

1687-0530

Online ISSN

2356-8550

Link

https://jesaun.journals.ekb.eg/article_215432.html

Detail API

https://jesaun.journals.ekb.eg/service?article_code=215432

Order

4

Type

Research Paper

Type Code

1,438

Publication Type

Journal

Publication Title

JES. Journal of Engineering Sciences

Publication Link

https://jesaun.journals.ekb.eg/

MainTitle

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Details

Type

Article

Created At

23 Jan 2023