Membraneless Piezoelectric MEMS speakers based on AlN Thin Film
Last updated: 04 Jan 2025
10.21608/jesaun.2021.105026.1087
AlN, MEMS, Micro speakers, Piezoelectric
Ahmed
Fawzy
1 Sokr Street, Ain Shams, Cairo, Egypt
ahmed.fawzy.1986@ieee.org
cairo
50
1
29242
2022-01-01
2021-11-08
2022-01-01
1
8
1687-0530
2356-8550
https://jesaun.journals.ekb.eg/article_215432.html
https://jesaun.journals.ekb.eg/service?article_code=215432
4
Research Paper
1,438
Journal
JES. Journal of Engineering Sciences
https://jesaun.journals.ekb.eg/
Membraneless Piezoelectric MEMS speakers based on AlN Thin Film
Details
Type
Article
Created At
23 Jan 2023