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309845

Accurate Measurement of Surface Irregularities for a Standard Sphere Using Fizeau Laser Interferometer

Article

Last updated: 03 Jan 2025

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Abstract

Spherical surfaces are essential components in optical systems for different applications. Also, standard ‎spheres are typically employed to calibrate dimensional and mass-measuring instruments. Therefore, ‎measuring and eliminating the surface irregularities of these spheres represents a challenge for modern ‎industries. Surface irregularities can be measured by either the contact method (as stylus profilometers) ‎or the non-contact method (as interferometers). The Fizeau laser interferometer (GPI-XP, Zygo Co.) is ‎typically used to accurately measure surface irregularities for flat surfaces, lenses, and mirrors of 102 mm ‎diameter, and it is not prepared for testing heavy spheres. This work presents a modification for the ‎interferometric system to expand its capability for testing spheres of diameters up to 145 mm and masses ‎up to 2 kg. Also, the modification provides automatic rotation for the tested surfaces (an electric rotating ‎platform) to avoid the disadvantages of manual rotation (a tweezer). At different rotation angles, the ‎measurements are performed on a mass-standard silicon sphere (SiScKg-02-d, PTB Inst.). The average ‎measured value of the surface irregularities is 43.9 nm, with an improved repeatability of 2.8 nm and a ‎minimized measurement uncertainty of ±6.8 nm. The evaluation of the uncertainty budget is also ‎investigated in this study.‎

DOI

10.21608/jsrs.2023.220756.1112

Keywords

Fizeau, Interferometry, Surface irregularities, Silicon sphere

Authors

First Name

Ahmed

Last Name

Ali

MiddleName

-

Affiliation

Engineering and Surface Metrology Laboratory, National Institute of Standards (NIS), Giza, Egypt

Email

ahmed.ali@nis.sci.eg

City

Giza

Orcid

0000-0001-9941-5051

First Name

Mohamed

Last Name

Amer

MiddleName

-

Affiliation

Engineering and Surface Metrology Laboratory, National Institute of Standards (NIS), Giza, Egypt

Email

amer@nis.sci.eg

City

Giza

Orcid

0000-0002-1860-2013

First Name

Nadra

Last Name

Nada

MiddleName

-

Affiliation

Physics Department, Faculty of Women for Arts, Science, and Education, Ain Shams University, Cairo, Egypt

Email

drnadranada@gmail.com

City

Giza

Orcid

0000-0002-2507-4191

Related Issue

-2

Receive Date

2023-07-03

Publish Date

2023-07-26

Print ISSN

2356-8364

Online ISSN

2356-8372

Link

https://jsrs.journals.ekb.eg/article_309845.html

Detail API

https://jsrs.journals.ekb.eg/service?article_code=309845

Order

11

Type

Original Article

Type Code

656

Publication Type

Journal

Publication Title

Journal of Scientific Research in Science

Publication Link

https://jsrs.journals.ekb.eg/

MainTitle

Accurate Measurement of Surface Irregularities for a Standard Sphere Using Fizeau Laser Interferometer

Details

Type

Article

Created At

24 Dec 2024