Beta
331798

Accurate Measurement of Surface Irregularities for a Standard Sphere Using Fizeau Laser Interferometer

Article

Last updated: 03 Jan 2025

Subjects

-

Tags

-

Abstract

Spherical surfaces are essential components in optical systems for different applications. Also, standard spheres are typically employed to calibrate dimensional and mass-measuring instruments. Therefore, measuring and eliminating the surface irregularities of these spheres represents a challenge for modern industries. Surface irregularities can be measured by either the contact method (as stylus profilometers) or the non-contact method (as interferometers). The Fizeau laser interferometer (GPI-XP, Zygo Co.) is typically used to accurately measure surface irregularities for flat surfaces, lenses, and mirrors of 102 mm diameter, and it is not prepared for testing heavy spheres. This work presents a modification for the interferometric system to expand its capability for testing spheres of diameters up to 145 mm and masses up to 2 kg. Also, the modification provides automatic rotation for the tested surfaces (an electric rotating platform) to avoid the disadvantages of manual rotation (a tweezer). At different rotation angles, the measurements are performed on a mass-standard silicon sphere (SiScKg-02-d, PTB Inst.). The average measured value of the surface irregularities is 43.9 nm, with an improved repeatability of 2.8 nm and a minimized measurement uncertainty of ±6.8 nm. The evaluation of the uncertainty budget is also investigated in this study.

DOI

10.21608/jsrs.2023.331798

Keywords

Fizeau, Interferometry, Surface irregularities, Silicon sphere

Authors

First Name

Ahmed

Last Name

Saleh

MiddleName

Ali

Affiliation

Engineering and Surface Metrology Laboratory, National Institute of Standards (NIS), Ministry of Higher Education & Scientific Research

Email

ahmed.ali@nis.sci.eg

City

-

Orcid

0000-0001-9941-5051

First Name

Mohamed

Last Name

Amer

MiddleName

-

Affiliation

Engineering and Surface Metrology Laboratory, National Institute of Standards (NIS), M. Anwar El-Sadat St., 12211 Giza, Egypt

Email

amer@nis.sci.eg

City

-

Orcid

0000-0002-1860-2013

First Name

Nadra

Last Name

Nada

MiddleName

-

Affiliation

Physics Department, Faculty of Women for Arts, Science, and Education, Ain Shams University, Asmaa Fahmy St., 11757 Cairo, Egypt

Email

drnadranada@gmail.com

City

-

Orcid

0000-0002-2507-4191

Volume

40

Article Issue

1

Related Issue

44922

Issue Date

2023-12-01

Receive Date

2023-12-23

Publish Date

2023-12-01

Page Start

1

Page End

14

Print ISSN

2356-8364

Online ISSN

2356-8372

Link

https://jsrs.journals.ekb.eg/article_331798.html

Detail API

https://jsrs.journals.ekb.eg/service?article_code=331798

Order

2

Type

Original Article

Type Code

656

Publication Type

Journal

Publication Title

Journal of Scientific Research in Science

Publication Link

https://jsrs.journals.ekb.eg/

MainTitle

Accurate Measurement of Surface Irregularities for a Standard Sphere Using Fizeau Laser Interferometer

Details

Type

Article

Created At

24 Dec 2024