Last updated: 23 Jan 2023
10.21608/djs.2021.190753
Radio frequency sheaths, He discharge, Ion energy and angular distribution, Electron energy distribution, Power dissipation
M.
Shihab
Tanta University, Faculty of Science, Physics Department, Tanta, Egypt.
A.
Elbadawy
Tanta University, Faculty of Science, Physics Department, Tanta, Egypt.
M. S.
Afify
Department of Physics, Faculty of Science, Benha University, Benha, P.O. Box 13518, Egypt.
N.
El-Siragy
Tanta University, Faculty of Science, Physics Department, Tanta, Egypt.
43
1
24870
2021-05-01
2021-08-22
2021-05-01
89
96
1012-5965
2735-5306
https://djs.journals.ekb.eg/article_190753.html
https://djs.journals.ekb.eg/service?article_code=190753
7
Research and Reference
1,686
Journal
Delta Journal of Science
https://djs.journals.ekb.eg/
Details
Type
Article
Created At
23 Jan 2023