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190753

Kinetic Simulation of He radio frequency capacitively coupled plasma

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Last updated: 23 Jan 2023

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Abstract

Radiofrequency capacitively coupled plasma is studied theoretically using a Particle-in-Cell code. For He discharge, the timeaveraged sheaths are in the range of few centimeters. The sheath potential, ion, and electron energy and angular distributions, discharge current, and dissipated power depend on the driven potentials and frequencies. Increasing the amplitude of the high radio frequencies increases the bulk density and the sheath potential and, consequently, increases the plasma processing rate. Increasing the intermediate radio frequency amplitude allows a wider sheath with a broad ion energy distribution and a narrower ion angular distribution. Changing the amplitude and the phase shift between driven frequencies provide different energies and angular distribution allowing performing various processes. The interplay between the sheath and bulk dynamics in the intermediate radiofrequency regime and the high-frequency regime may excite harmonics in the discharge current.

DOI

10.21608/djs.2021.190753

Keywords

Radio frequency sheaths, He discharge, Ion energy and angular distribution, Electron energy distribution, Power dissipation

Authors

First Name

M.

Last Name

Shihab

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Affiliation

Tanta University, Faculty of Science, Physics Department, Tanta, Egypt.

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First Name

A.

Last Name

Elbadawy

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Affiliation

Tanta University, Faculty of Science, Physics Department, Tanta, Egypt.

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Orcid

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First Name

M. S.

Last Name

Afify

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Affiliation

Department of Physics, Faculty of Science, Benha University, Benha, P.O. Box 13518, Egypt.

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First Name

N.

Last Name

El-Siragy

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Affiliation

Tanta University, Faculty of Science, Physics Department, Tanta, Egypt.

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Volume

43

Article Issue

1

Related Issue

24870

Issue Date

2021-05-01

Receive Date

2021-08-22

Publish Date

2021-05-01

Page Start

89

Page End

96

Print ISSN

1012-5965

Online ISSN

2735-5306

Link

https://djs.journals.ekb.eg/article_190753.html

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https://djs.journals.ekb.eg/service?article_code=190753

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7

Type

Research and Reference

Type Code

1,686

Publication Type

Journal

Publication Title

Delta Journal of Science

Publication Link

https://djs.journals.ekb.eg/

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Article

Created At

23 Jan 2023