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38420

FORMATION OF ZIRCONIUM TITANATE FROM MULTI-LAYERED STRUCTURE OF ZrO2 AND TiO2 DEPOSITED BY PULSED RAPID THERMAL CHEMICAL VAPOUR DEPOSITION

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Last updated: 04 Jan 2025

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Abstract

ABSTRACT
PRTCVD (pulsed rapid thermal chemical vapor deposition) method has been introduced to prepare zirconium titanate (ZrTiO4) films from a multi-layered structure composed of ZrO2 and TiO2 as a primitive oxide, which allows for the preparation of a given film with different element per cycle and precise control over the thickness of the film. The feasibility of PRTCVD was evaluated and it was confirmed that a multi-layered structure composed of different primitive oxides can be easily produced by PRTCVD and transformed into a multi-component single phase oxide such as zirconium titanate by an appropriate thermal annealing process.

DOI

10.21608/iccee.2008.38420

Keywords

PRTCVD, Zirconium titanate, Multi-layered structure, Thermal annealing

Authors

First Name

KO

Last Name

K.

MiddleName

C.

Affiliation

Graduate student, Dpt. of Chemical Engineering, Kangwon National University, Chuncheon, Korea.

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First Name

SONG

Last Name

Y.

MiddleName

B.

Affiliation

Analytic scientist, Central Laboratory, Kangwon National University, Chuncheon, Korea.

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Orcid

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First Name

LEE

Last Name

G.

MiddleName

W.

Affiliation

Professor, Dpt. of Chemical Engineering, Kangwon National University, Chuncheon, Korea, Tel)+82 11 380 5219.

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Volume

4

Article Issue

4th International Conference On Chemical & Environmental Engineering

Related Issue

6173

Issue Date

2008-05-01

Receive Date

2019-07-02

Publish Date

2008-05-01

Page Start

496

Page End

502

Print ISSN

2636-4336

Online ISSN

2636-4344

Article File

ICCEE_Volume 4_Issue 4th International Conference On Chemical & Environmenta….pdf

PDF . 626.0kB

Link

https://iccee.journals.ekb.eg/article_38420.html

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https://iccee.journals.ekb.eg/service?article_code=38420

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Original Article

Type Code

832

Publication Type

Journal

Publication Title

The International Conference on Chemical and Environmental Engineering

Publication Link

https://iccee.journals.ekb.eg/

MainTitle

FORMATION OF ZIRCONIUM TITANATE FROM MULTI-LAYERED STRUCTURE OF ZrO2 AND TiO2 DEPOSITED BY PULSED RAPID THERMAL CHEMICAL VAPOUR DEPOSITION

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Article

Created At

22 Jan 2023