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22050

An Analytical Model for Repulsive Electrostatic Microactuator Using a Conformal Mapping Technique

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Last updated: 04 Jan 2025

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Abstract

Electrostatic microactuators are able to produce a repulsive force in the out-ofplane direction. The electrostatic microactuators use an asymmetric electric field surrounding the top and bottom surfaces of the moving fingers to produce a repulsive force. The displacement of moving finger is not limited by the “pull-in" effect. In addition, the usage of a repulsive force leads to the elimination of the sticking problem. In this paper, an analytical model for the repulsive-force, and the fringe capacitance of a microactuator is developed putting the moving plate thickness in consideration using conformal mapping techniques. With this technique, electric field lines are geometrically approximated to separately model the different capacitive components. These components are finally combined to obtain the equivalent fringe capacitance. The model reveals the maximum out-of-plane displacement. Rules are derived based on the analytical model for tuning and optimization of the microactuator performance. Simulations are conducted to verify the analytical model. In addition, the mechanism for generating the repulsive force is explained.

DOI

10.21608/asat.2013.22050

Authors

First Name

M.

Last Name

Tayel

MiddleName

B.

Affiliation

Faculty of Engineering, Alexandria University, Egypt.

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Orcid

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First Name

A.

Last Name

El Masry

MiddleName

M.

Affiliation

Faculty of Engineering, Alexandria University, Egypt.

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-

City

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Orcid

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Volume

15

Article Issue

AEROSPACE SCIENCES & AVIATION TECHNOLOGY, ASAT - 15 – May 28 - 30, 2013

Related Issue

4183

Issue Date

2013-05-01

Receive Date

2018-12-16

Publish Date

2013-05-01

Page Start

1

Page End

12

Print ISSN

2090-0678

Online ISSN

2636-364X

Link

https://asat.journals.ekb.eg/article_22050.html

Detail API

https://asat.journals.ekb.eg/service?article_code=22050

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19

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Original Article

Type Code

737

Publication Type

Journal

Publication Title

International Conference on Aerospace Sciences and Aviation Technology

Publication Link

https://asat.journals.ekb.eg/

MainTitle

An Analytical Model for Repulsive Electrostatic Microactuator Using a Conformal Mapping Technique

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Article

Created At

22 Jan 2023