A chemical spray pyrolysis technique was used to deposit a vanadium pentoxide (V₂O₅) thin films on glass substrate with a deposition temperature ranged from 300°C to 500°C in step of 50°C. From ammonium meta vanadate aqua precursor solution molarity of (0.1 M) was used as a source of vanadium. The effect of deposition temperature on structure, morphological, electrical conductivity and optical properties wasanalyzedat constant preparation time, solution molarity and the distance between spray nozzle and substrate.X-ray diffraction patterns shown that an orthorhombic cubic structure withgrowth along (001) plane. With increasing the substrate temperature, the electrical conductivity was increased, and the scanning electron microscopy clarified that the crystallinity of V₂O₅ thin films was effectively modified. The optical results revealed that energy band gap of V₂O₅ films deposited at 400^oC, 450^oC and 500^oC is 2.38 eV for direct allowed transition. Based on the observed results the V₂O₅ phase can be well controlled by altering the substrate temperature. All prepared thin films up to 400^oC show transparency in both visible and near IR region.