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150884

Gas type role on the dynamics of channel spark pulsed electron deposition system

Article

Last updated: 03 Jan 2025

Subjects

-

Tags

Physics

Abstract

In this paper, the effect of feeding gas type on the dynamics of channel spark pulsed electron deposition system is investigated. Electrical, magnetic, and optical characterisations of the system were measured for different feeding gases, oxygen (O2), nitrogen (N2), and argon (Ar). The discharge current for each gas type was measured with maximum value of 1189 A for O2 at -13 kV applied voltage. The discharge current and voltage waveforms were simulated by LRC circuit theory. Effect of gas pressure on the maximum discharge current and total inductance was also investigated. The beam current investigated by faraday cup and reached maximum electron beam current of 136 A for O2 gas. Two magnetic pickup coils were employed for the measurements of beam kinetic dynamics and the measured beam speed was around 0.4× 106 m/sec. Electron beam plasma density was calculated from faraday cup and magnetic coils signals and found to be 1.96×1020 m-3. Optical emission spectra were also measured to identify reactive species and its role in electron beam interaction with graphite target for thin film deposition application. The ability of using the system for thin film deposition is demonstrated by depositing amorphous hydrogenated carbon (a-C:H) films over silicon substrates.

DOI

10.21608/absb.2020.41063.1082

Keywords

Pulsed Electron Deposition, channel spark device, Faraday cup, thin film deposition, amorphous hydrogenated carbon

Authors

First Name

Ahmed

Last Name

Abdo

MiddleName

-

Affiliation

Physics Department, Faculty of Science, Al-Azhar University, Cairo, Egypt

Email

ahmedshaban293@yahoo.com

City

-

Orcid

-

First Name

Mahmoud

Last Name

Elgarhy

MiddleName

-

Affiliation

Physics Department, Faculty of Science, Al-Azhar University, Cairo, Egypt , Department of Nuclear Engineering, Seoul National University, Seoul, Korea.

Email

elgarhy@azhar.edu.eg

City

-

Orcid

-

First Name

Ahmed

Last Name

Abouelsayed

MiddleName

-

Affiliation

Spectroscopy Department, Physics Division, National Research Centre, 33 El Bohouth st. (fromer El Tahrir st.) P.O. 12622 Dokki – Giza – Egypt.

Email

as.abouelsayed@gmail.com

City

-

Orcid

-

First Name

Usama

Last Name

Rashed

MiddleName

-

Affiliation

Physics Department, Faculty of Science, Al-Azhar University, Cairo, Egypt

Email

usamarashed@yahoo.com

City

-

Orcid

-

First Name

Safwat

Last Name

Hassaballa

MiddleName

-

Affiliation

Physics Department, Faculty of Science, Al-Azhar Universitrt, Cairo, Egypt , Department of Physics Faculty of Science, Islamic University of Madinah, Medina, Saudi Arabia.

Email

safwat_hassaballa@yahoo.com

City

-

Orcid

-

Volume

31

Article Issue

Issue 2-B

Related Issue

22243

Issue Date

2020-12-01

Receive Date

2020-09-03

Publish Date

2020-12-01

Page Start

11

Page End

19

Print ISSN

1110-2535

Online ISSN

2636-3305

Link

https://absb.journals.ekb.eg/article_150884.html

Detail API

https://absb.journals.ekb.eg/service?article_code=150884

Order

5

Type

Original Article

Type Code

520

Publication Type

Journal

Publication Title

Al-Azhar Bulletin of Science

Publication Link

https://absb.journals.ekb.eg/

MainTitle

Gas type role on the dynamics of channel spark pulsed electron deposition system

Details

Type

Article

Created At

22 Jan 2023