Zinc titanate/silica precursor nanopowders were formed from the raw materials of zinc nitrate, titanium isopropoxide and tetraethyorthosilicate using sol gel route at acidic environment. The phase formation, thermal, and terahertz mechanism of the prepared nanopowders was investigated using X-ray diffraction and FullProf software), scanning electron microscopy, Thermogravimetric analysis, and Terahertz Time-Domain Spectroscopy System. The XRD analysis of nanopowders combined with Rietveld construction refinement allowed determination of crystalline phases to present and their structural parameters. SEM morphology of the nanopowders is nearly fine spherical with a narrow distribution centered at about 20 nm. Increased introduction of silica decreases the calcination temperature and decreases the terahertz absorption coefficient.