Thin films of nanometer sized cadmium sulfide were directly prepared by aerosol-assisted chemical vapor deposition (AA-CVD) method, cadmium ethyl xanthate complex was used as precursor material at 225 oC, 250 oC and 275 oC. The thermal decomposition of complex was characterized by thermal analysis, (thermogravimetric analysis (TGA) and a differential scanning calorimetry (DSC)). The prepared CdS thin films have been characterized by XRD and SEM- EDX analysis. TGA curves ensured that the rapid decomposition of [Cd(S2COEt)2] gives a CdS in single step between 150 oC and 200 oC. XRD patterns confirmed that the CdS particles crystalized as a hexagonal crystallographic phase at low temperatures. The grain size of particles increased with increasing the preparation temperatures from 225 oC to 275 oC,. The spherical CdS nanoparticals were observed in SEM analysis.